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센서 , 기능성박막 : Pt 코팅된 Si 기판에 제조한 KLN 박막의 구조적 특성

박성근, 이기직, 백민수, 전병억, 김진수, 남기홍

Structural Properties of KLN Thin Film Deposited on Pt Coated Si Substrate

Sung Kun Park, Ki Jik Lee, Min Soo Baek, Byeong Eok Kim, Jin Soo Kim, Ki Hong Nam
J Electr Electron Mater 2001;14(5):410-416.
Published online: May 1, 2001
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Structural Properties of KLN Thin Film Deposited on Pt Coated Si Substrate
J Electr Electron Mater. 2001;14(5):410-416.   Published online May 1, 2001
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.
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Structural Properties of KLN Thin Film Deposited on Pt Coated Si Substrate
J Electr Electron Mater. 2001;14(5):410-416.   Published online May 1, 2001
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