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POU 슬러리 필터와 탈이온수의 고분사법에 의한 패드수명의 개선

박성우, 김상용, 서용진

Improvement of Pad Lifetime using POU ( Point of Use ) Slurry Filter and High Spray Method of De - lonized Water

Sung Woo Park, Sang Yong Kim, Yong Jin Seo
J Electr Electron Mater 2001;14(9):707-713.
Published online: September 1, 2001
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Improvement of Pad Lifetime using POU ( Point of Use ) Slurry Filter and High Spray Method of De - lonized Water
J Electr Electron Mater. 2001;14(9):707-713.   Published online September 1, 2001
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

Format:
Include:
Improvement of Pad Lifetime using POU ( Point of Use ) Slurry Filter and High Spray Method of De - lonized Water
J Electr Electron Mater. 2001;14(9):707-713.   Published online September 1, 2001
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