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센서 , 기능성박막 : 반응성 스퍼터링으로 성장된 결정성 질화탄소막의 기계적 특성

이성필, 강종봉

Sensor , Thin Film : Mechanical Characteristics of Crystalline Carbon Nitride Films Grown by Reactive Sputtering

Sung Pil Lee, Jong Bong Kang
J Electr Electron Mater 2002;15(2):147-152.
Published online: February 1, 2002
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Sensor , Thin Film : Mechanical Characteristics of Crystalline Carbon Nitride Films Grown by Reactive Sputtering
J Electr Electron Mater. 2002;15(2):147-152.   Published online February 1, 2002
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

Format:
Include:
Sensor , Thin Film : Mechanical Characteristics of Crystalline Carbon Nitride Films Grown by Reactive Sputtering
J Electr Electron Mater. 2002;15(2):147-152.   Published online February 1, 2002
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