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활성화 반응성 증착법에 의한 In2O3 박막성장 및 특성

최명진, 정진원, 왕진석

The Characterization of In2O3 Thin Films Prepared by Activated Reactive Evaporation Method

Myung Jin Choi, Jin Won Jung, Jin Suk Wang
J Electr Electron Mater 1992;5(4):400-404.
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The Characterization of In2O3 Thin Films Prepared by Activated Reactive Evaporation Method
J Electr Electron Mater. 1992;5(4):400-404.
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Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

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The Characterization of In2O3 Thin Films Prepared by Activated Reactive Evaporation Method
J Electr Electron Mater. 1992;5(4):400-404.
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