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텅스텐 플러그 CVD 공정에서 SIH4 Soak의 영향

이우선, 서용진, 김상용, 박진성

SIH4 Soak Effects in the W plug CVD Process

Woo Sun Lee, Yong Jin Seo, Sang Yong Kim, Jin Seung Park
J Korean Inst Electr Electron Mater Eng 2003;16(1):1-4.
Published online: January 1, 2003
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SIH4 Soak Effects in the W plug CVD Process
J Korean Inst Electr Electron Mater Eng. 2003;16(1):1-4.   Published online January 1, 2003
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

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SIH4 Soak Effects in the W plug CVD Process
J Korean Inst Electr Electron Mater Eng. 2003;16(1):1-4.   Published online January 1, 2003
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