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센서, 기능성박막 : 고정밀 레이져 가공 기술을 이용한 PRT 제작 및 특성 분석

노상수, 서정환, 정귀상, 김광호

Sensor Thin Film : Fabrication and Analysis of Characteristics of PRT using High-fine Laser Trimming Technology

S. S. Noh, J. H. Seo, G. S. Chung, K. H. Kim
J Electr Electron Mater 2003;16(1):46-52.
Published online: January 1, 2003
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Sensor Thin Film : Fabrication and Analysis of Characteristics of PRT using High-fine Laser Trimming Technology
J Electr Electron Mater. 2003;16(1):46-52.   Published online January 1, 2003
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Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.
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Sensor Thin Film : Fabrication and Analysis of Characteristics of PRT using High-fine Laser Trimming Technology
J Electr Electron Mater. 2003;16(1):46-52.   Published online January 1, 2003
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