Investigation on DHF Application at Metal CMP Cleaning Process

Sang Yong Kim; Nam Hoon Kim; In Pyo Kim; Eui Goo Chang

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Metal CMP 세정 공정에서 DHF 적용에 관한 연구

김상용, 김남훈, 김인표, 장의구

Investigation on DHF Application at Metal CMP Cleaning Process

Sang Yong Kim, Nam Hoon Kim, In Pyo Kim, Eui Goo Chang

J Electr Electron Mater 2003;16(7):569-572.
Published online: July 1, 2003

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Keywords: DHF, Barrier metal, Oxide loss, Residue, Metal contamination

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Investigation on DHF Application at Metal CMP Cleaning Process

J Electr Electron Mater. 2003;16(7):569-572. Published online July 1, 2003

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Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

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Investigation on DHF Application at Metal CMP Cleaning Process

J Electr Electron Mater. 2003;16(7):569-572. Published online July 1, 2003

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Metal CMP 세정 공정에서 DHF 적용에 관한 연구

Investigation on DHF Application at Metal CMP Cleaning Process

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