The Passivation of GaAs Surface by Laser CVD

Kwon Sung Yung; Myeon Song Jeong; Moo Moon Byung; Hee Rhie Dong

doi:10.4313/JKEM.2003.16.12s.1242

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The Passivation of GaAs Surface by Laser CVD

Kwon Sung Yung, Myeon Song Jeong, Moo Moon Byung, Hee Rhie Dong

J Korean Inst Electr Electron Mater Eng 2003;16(12s):1242-1247.

DOI: https://doi.org/10.4313/JKEM.2003.16.12s.1242

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Keywords: Laser CVD, Passivation, DLTS method, GaAs surface

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The Passivation of GaAs Surface by Laser CVD

J Korean Inst Electr Electron Mater Eng. 2003;16(12s):1242-1247.

DOI: https://doi.org/10.4313/JKEM.2003.16.12s.1242

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Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

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The Passivation of GaAs Surface by Laser CVD

J Korean Inst Electr Electron Mater Eng. 2003;16(12s):1242-1247.

DOI: https://doi.org/10.4313/JKEM.2003.16.12s.1242

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The Passivation of GaAs Surface by Laser CVD

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