The Passivation of GaAs Surface by Laser CVD

Kwon Sung Yung; Myeon Song Jeong; Moo Moon Byung; Hee Rhie Dong

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The Passivation of GaAs Surface by Laser CVD

Kwon Sung Yung, Myeon Song Jeong, Moo Moon Byung, Hee Rhie Dong

J Electr Electron Mater 2003;16(12s):1242-1247.

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Keywords: Laser CVD, Passivation, DLTS method, GaAs surface

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The Passivation of GaAs Surface by Laser CVD

J Electr Electron Mater. 2003;16(12s):1242-1247.

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The Passivation of GaAs Surface by Laser CVD

J Electr Electron Mater. 2003;16(12s):1242-1247.

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The Passivation of GaAs Surface by Laser CVD

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