Formation of TiN by Ti Nitridation in NH3 Ambient

Geun U Lee; Su Jin Park; Jeong Ju Yu; Yeong Ho Kwon; Ju Yeon Kim; Hyeong Tag Jeon; Gyu Sig Bae

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NH3 분위기에서 Ti 질화에 의한 TiN 형성

이근우, 박수진, 유정주, 권영호, 김주연, 전형탁, 배규식

Formation of TiN by Ti Nitridation in NH3 Ambient

Geun U Lee, Su Jin Park, Jeong Ju Yu, Yeong Ho Kwon, Ju Yeon Kim, Hyeong Tag Jeon, Gyu Sig Bae

J Electr Electron Mater 2004;17(2):150-155.
Published online: February 1, 2004

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Keywords: TiN, Diffusion barrier, Nitridation, NH3 ambient

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Formation of TiN by Ti Nitridation in NH3 Ambient

J Electr Electron Mater. 2004;17(2):150-155. Published online February 1, 2004

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Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

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Formation of TiN by Ti Nitridation in NH3 Ambient

J Electr Electron Mater. 2004;17(2):150-155. Published online February 1, 2004

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NH3 분위기에서 Ti 질화에 의한 TiN 형성

Formation of TiN by Ti Nitridation in NH3 Ambient

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