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NH3 분위기에서 Ti 질화에 의한 TiN 형성

이근우, 박수진, 유정주, 권영호, 김주연, 전형탁, 배규식

Formation of TiN by Ti Nitridation in NH3 Ambient

Geun U Lee, Su Jin Park, Jeong Ju Yu, Yeong Ho Kwon, Ju Yeon Kim, Hyeong Tag Jeon, Gyu Sig Bae
J Korean Inst Electr Electron Mater Eng 2004;17(2):150-155.
Published online: February 1, 2004
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Formation of TiN by Ti Nitridation in NH3 Ambient
J Korean Inst Electr Electron Mater Eng. 2004;17(2):150-155.   Published online February 1, 2004
DOI: https://doi.org/10.4313/JKEM.2004.17.2.150
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.
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Formation of TiN by Ti Nitridation in NH3 Ambient
J Korean Inst Electr Electron Mater Eng. 2004;17(2):150-155.   Published online February 1, 2004
DOI: https://doi.org/10.4313/JKEM.2004.17.2.150
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