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펄스레이저 증착법에서 기판-플룸 각 변화가 ZnO 박막의 구조 및 광학적 특성에 미치는 영향

강정석, 강홍성, 김재원, 이상렬

Display,Optical Deyices : Structural and Optical Properties of ZnO Thin Films Grown at Various Plume-Substrate Angles by Pulsed Laser Deposition

Jeong Seog Kang, Hong Seong Kang, Jae Won Kim, Sang Lyeol Lee
J Electr Electron Mater 2004;17(3):329-332.
Published online: March 1, 2004
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Display,Optical Deyices : Structural and Optical Properties of ZnO Thin Films Grown at Various Plume-Substrate Angles by Pulsed Laser Deposition
J Electr Electron Mater. 2004;17(3):329-332.   Published online March 1, 2004
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.
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Display,Optical Deyices : Structural and Optical Properties of ZnO Thin Films Grown at Various Plume-Substrate Angles by Pulsed Laser Deposition
J Electr Electron Mater. 2004;17(3):329-332.   Published online March 1, 2004
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