Analysis of the Critical Characteristics in the Superconducting Strip Lines by ICP Etching System

Seok Cheol Ko; Hyeong Gon Kang; Hyo Sang Choi; Sung Chae Yang; Byoung Sung Han

doi:10.4313/JKEM.2004.17.7.782

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ICP 식각 시스템에 의한 초전도 스트립 라인의 임계 특성 분석

고석철, 강형곤, 최효상, 양성채, 한병성

Analysis of the Critical Characteristics in the Superconducting Strip Lines by ICP Etching System

Seok Cheol Ko, Hyeong Gon Kang, Hyo Sang Choi, Sung Chae Yang, Byoung Sung Han

J Korean Inst Electr Electron Mater Eng 2004;17(7):782-787.
Published online: July 1, 2004

DOI: https://doi.org/10.4313/JKEM.2004.17.7.782

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Keywords: SFFT, ICP etching system, AFM, Abrikosov vortex

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Analysis of the Critical Characteristics in the Superconducting Strip Lines by ICP Etching System

J Korean Inst Electr Electron Mater Eng. 2004;17(7):782-787. Published online July 1, 2004

DOI: https://doi.org/10.4313/JKEM.2004.17.7.782

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Analysis of the Critical Characteristics in the Superconducting Strip Lines by ICP Etching System

J Korean Inst Electr Electron Mater Eng. 2004;17(7):782-787. Published online July 1, 2004

DOI: https://doi.org/10.4313/JKEM.2004.17.7.782

Articles

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ICP 식각 시스템에 의한 초전도 스트립 라인의 임계 특성 분석

Analysis of the Critical Characteristics in the Superconducting Strip Lines by ICP Etching System

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