Preparation of ITO Thin Films by FTS(Facing Targets Sputtering) Method

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FTS법을 이용한 ITO박막의 제작

김건희, 금민종, 김한기, 손인환, 장경욱, 이원재, 최형욱, 박용서, 김경환

Preparation of ITO Thin Films by FTS(Facing Targets Sputtering) Method

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J Electr Electron Mater 2004;17(11):1230-1233.
Published online: November 1, 2004

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Keywords: ITO, FTS, Electric characteristics, Transmittance, Surface roughness

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Preparation of ITO Thin Films by FTS(Facing Targets Sputtering) Method

J Electr Electron Mater. 2004;17(11):1230-1233. Published online November 1, 2004

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Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

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Preparation of ITO Thin Films by FTS(Facing Targets Sputtering) Method

J Electr Electron Mater. 2004;17(11):1230-1233. Published online November 1, 2004

Articles

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FTS법을 이용한 ITO박막의 제작

Preparation of ITO Thin Films by FTS(Facing Targets Sputtering) Method

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