Simulation of Ultrasonic Dry Cleaning for Semiconductor/display Device Application

Articles

Page Path

반도체/디스플레이 소자용 초음파 건식세정 시뮬레이션 연구

윤의중, 이강원, 김철호, 이석태

Simulation of Ultrasonic Dry Cleaning for Semiconductor/display Device Application

, , ,

J Electr Electron Mater 2004;17(12):1259-1263.
Published online: December 1, 2004

4 Views
0 Download
0 Crossref
0 Scopus

Full Article

Download PDF

Keywords: Ultrasonic dry cleaning, Transducer, LCD, Semiconductor, Horn, Clean air

Cite

CITE

export

Copy Download

Format

Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

Format:

RIS — For EndNote, ProCite, RefWorks, and most other reference management software
BibTeX — For JabRef, BibDesk, and other BibTeX-specific software

Include:

Citation for the content below
Citation and abstract for the content below

Simulation of Ultrasonic Dry Cleaning for Semiconductor/display Device Application

J Electr Electron Mater. 2004;17(12):1259-1263. Published online December 1, 2004

Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

Format:

RIS — For EndNote, ProCite, RefWorks, and most other reference management software
bib — For JabRef, BibDesk, and other BibTeX-specific software

Include:

Citation for the content below
Citation and abstract for the content below

Simulation of Ultrasonic Dry Cleaning for Semiconductor/display Device Application

J Electr Electron Mater. 2004;17(12):1259-1263. Published online December 1, 2004

Articles

Page Path

반도체/디스플레이 소자용 초음파 건식세정 시뮬레이션 연구

Simulation of Ultrasonic Dry Cleaning for Semiconductor/display Device Application

Full Article

CITE

Download Citation

Format:

Include:

Related articles

ABOUT

BROWSE ARTICLES

EDITORIAL POLICIES

FOR CONTRIBUTORS