A Study on CMP Properties of SnO2 Thin Film for Application of Gas Sensor

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가스센서 적용을 위한 SnO2 박막의 CMP 특성 연구

이우선, 최권우, 김남훈, 박진성, 서용진

A Study on CMP Properties of SnO2 Thin Film for Application of Gas Sensor

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J Electr Electron Mater 2004;17(12):1296-1300.
Published online: December 1, 2004

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Keywords: CMP, chemical mechanical polishing, SnO2 thin film, Removal rate, Non-uniformity

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A Study on CMP Properties of SnO2 Thin Film for Application of Gas Sensor

J Electr Electron Mater. 2004;17(12):1296-1300. Published online December 1, 2004

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Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

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A Study on CMP Properties of SnO2 Thin Film for Application of Gas Sensor

J Electr Electron Mater. 2004;17(12):1296-1300. Published online December 1, 2004

Articles

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가스센서 적용을 위한 SnO2 박막의 CMP 특성 연구

A Study on CMP Properties of SnO2 Thin Film for Application of Gas Sensor

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