Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.
Electrochemical Polarization Characteristics and Effect of the CMP Performances of Tungsten and Titanium Film by H2O2 Oxidizer
J Korean Inst Electr Electron Mater Eng. 2005;18(6):515-520. Published online June 1, 2005
