Effect of Ambient Gases on Thermal Annealed ZnO Films deposited on Si(111) Substrates

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Si(111) 기판 위에 증착된 ZnO 박막의 열처리 분위기에 따른 구조적, 광학적 특성 연구

이주영, 김홍승, 정은수, 장낙원

Effect of Ambient Gases on Thermal Annealed ZnO Films deposited on Si(111) Substrates

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J Electr Electron Mater 2005;18(8):734-738.
Published online: August 1, 2005

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Keywords: ZnO, Thermal annealing, AES, XRD, PL

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Effect of Ambient Gases on Thermal Annealed ZnO Films deposited on Si(111) Substrates

J Electr Electron Mater. 2005;18(8):734-738. Published online August 1, 2005

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Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

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Citation for the content below
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Effect of Ambient Gases on Thermal Annealed ZnO Films deposited on Si(111) Substrates

J Electr Electron Mater. 2005;18(8):734-738. Published online August 1, 2005

Articles

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Si(111) 기판 위에 증착된 ZnO 박막의 열처리 분위기에 따른 구조적, 광학적 특성 연구

Effect of Ambient Gases on Thermal Annealed ZnO Films deposited on Si(111) Substrates

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