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저온공정 실리콘 산화막의 질소 패시베이션 효과

김준식, 정호균, 최병덕, 이기용, 이준신

Passivation of Silicon Oxide Film Deposited at Low Temperature by Annealing in Nitrogen Ambient

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J Electr Electron Mater 2006;19(4):334-338.
Published online: April 1, 2006
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Passivation of Silicon Oxide Film Deposited at Low Temperature by Annealing in Nitrogen Ambient
J Electr Electron Mater. 2006;19(4):334-338.   Published online April 1, 2006
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

Format:
Include:
Passivation of Silicon Oxide Film Deposited at Low Temperature by Annealing in Nitrogen Ambient
J Electr Electron Mater. 2006;19(4):334-338.   Published online April 1, 2006
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