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기판의 결정구조에 따른 RF 스퍼터링 ZnO 박막의 성장과 미세구조 분석

유인성, 소순진, 박춘배

Growth of ZnO Thin Films Depending on the Substrates by RF Sputtering and Analysis of Their Microstructures

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J Korean Inst Electr Electron Mater Eng 2006;19(5):461-466.
Published online: May 1, 2006
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Growth of ZnO Thin Films Depending on the Substrates by RF Sputtering and Analysis of Their Microstructures
J Korean Inst Electr Electron Mater Eng. 2006;19(5):461-466.   Published online May 1, 2006
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

Format:
Include:
Growth of ZnO Thin Films Depending on the Substrates by RF Sputtering and Analysis of Their Microstructures
J Korean Inst Electr Electron Mater Eng. 2006;19(5):461-466.   Published online May 1, 2006
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