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In-situ 분위기 Annealing에 따른 ZnO/Sapphire(0001) 박막의 구조적 특성 분석

왕민성, 유인성, 박춘배

Analysis of the Structural Properties for ZnO/Sapphire(0001) Thin Films by In-situ Atmosphere Annealing

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J Electr Electron Mater 2006;19(8):769-774.
Published online: August 1, 2006
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Analysis of the Structural Properties for ZnO/Sapphire(0001) Thin Films by In-situ Atmosphere Annealing
J Electr Electron Mater. 2006;19(8):769-774.   Published online August 1, 2006
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

Format:
Include:
Analysis of the Structural Properties for ZnO/Sapphire(0001) Thin Films by In-situ Atmosphere Annealing
J Electr Electron Mater. 2006;19(8):769-774.   Published online August 1, 2006
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