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테라비트급 나노 스케일 SONOS 플래시 메모리 제작 및 소자 특성 평가

김주연, 김문경, 김병철, 김정우, 서광열

Fabrication and Device Performance of Tera Bit Level Nano-scaled SONOS Flash Memories

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J Korean Inst Electr Electron Mater Eng 2007;20(12):1017-1021.
Published online: December 1, 2007
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Fabrication and Device Performance of Tera Bit Level Nano-scaled SONOS Flash Memories
J Korean Inst Electr Electron Mater Eng. 2007;20(12):1017-1021.   Published online December 1, 2007
DOI: https://doi.org/10.4313/JKEM.2007.20.12.1017
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.
Format:
Include:
Fabrication and Device Performance of Tera Bit Level Nano-scaled SONOS Flash Memories
J Korean Inst Electr Electron Mater Eng. 2007;20(12):1017-1021.   Published online December 1, 2007
DOI: https://doi.org/10.4313/JKEM.2007.20.12.1017
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