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PECVD로 합성한 다이아몬드상 카본박막의 전기적 특성

최원석, 박문기, 홍병유

Electrical Properties of Diamond-Like Carbon Thin Film synthesized by PECVD

Won Seok Choi, Mun Gi Park, Byung You Hong
J Electr Electron Mater 2008;21(11):973-976.
Published online: November 1, 2008
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Electrical Properties of Diamond-Like Carbon Thin Film synthesized by PECVD
J Electr Electron Mater. 2008;21(11):973-976.   Published online November 1, 2008
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Electrical Properties of Diamond-Like Carbon Thin Film synthesized by PECVD
J Electr Electron Mater. 2008;21(11):973-976.   Published online November 1, 2008
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