Electrical Properties of SiOCH Thin Films by Annealing

Min Seok Kim; Chang Su Hwang; Hong Bae Kim

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SiOCH 박막의 열처리에 따른 전기적인 특성

김민석, 황창수, 김홍배

Electrical Properties of SiOCH Thin Films by Annealing

Min Seok Kim, Chang Su Hwang, Hong Bae Kim

J Electr Electron Mater 2008;21(12):1090-1095.
Published online: December 1, 2008

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Keywords: SiOCH, C-V characteristic, Flat-band voltage, Leakage current

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Electrical Properties of SiOCH Thin Films by Annealing

J Electr Electron Mater. 2008;21(12):1090-1095. Published online December 1, 2008

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Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

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Electrical Properties of SiOCH Thin Films by Annealing

J Electr Electron Mater. 2008;21(12):1090-1095. Published online December 1, 2008

Articles

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SiOCH 박막의 열처리에 따른 전기적인 특성

Electrical Properties of SiOCH Thin Films by Annealing

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