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SiOCH 박막의 열처리에 대한 안정성 검토

박용헌, 김민석, 황창수, 김홍배

An Inspection of Stability for Annealing SiOCH Thin Flim

Yong Heon Park, Min Seok Kim, Chang Su Hwang, Hong Bae Kim
J Korean Inst Electr Electron Mater Eng 2009;22(1):41-46.
Published online: January 1, 2009
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An Inspection of Stability for Annealing SiOCH Thin Flim
J Korean Inst Electr Electron Mater Eng. 2009;22(1):41-46.   Published online January 1, 2009
DOI: https://doi.org/10.4313/JKEM.2009.22.1.041
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.
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An Inspection of Stability for Annealing SiOCH Thin Flim
J Korean Inst Electr Electron Mater Eng. 2009;22(1):41-46.   Published online January 1, 2009
DOI: https://doi.org/10.4313/JKEM.2009.22.1.041
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