An Inspection of Stability for Annealing SiOCH Thin Flim

Yong Heon Park; Min Seok Kim; Chang Su Hwang; Hong Bae Kim

Articles

Page Path

SiOCH 박막의 열처리에 대한 안정성 검토

박용헌, 김민석, 황창수, 김홍배

An Inspection of Stability for Annealing SiOCH Thin Flim

Yong Heon Park, Min Seok Kim, Chang Su Hwang, Hong Bae Kim

J Electr Electron Mater 2009;22(1):41-46.
Published online: January 1, 2009

8 Views
0 Download
0 Crossref
0 Scopus

prev next

Full Article

Download PDF

Keywords: SiOCH, BTMSM, Low-k, C-V characteristic

Cite

CITE

export

Copy Download

Format

Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

Format:

RIS — For EndNote, ProCite, RefWorks, and most other reference management software
BibTeX — For JabRef, BibDesk, and other BibTeX-specific software

Include:

Citation for the content below
Citation and abstract for the content below

An Inspection of Stability for Annealing SiOCH Thin Flim

J Electr Electron Mater. 2009;22(1):41-46. Published online January 1, 2009

Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

Format:

RIS — For EndNote, ProCite, RefWorks, and most other reference management software
bib — For JabRef, BibDesk, and other BibTeX-specific software

Include:

Citation for the content below
Citation and abstract for the content below

An Inspection of Stability for Annealing SiOCH Thin Flim

J Electr Electron Mater. 2009;22(1):41-46. Published online January 1, 2009

Correction Measures That Take Humidity into Account in Insulating Oil Test Measurement Results

Articles

Page Path

SiOCH 박막의 열처리에 대한 안정성 검토

An Inspection of Stability for Annealing SiOCH Thin Flim

Full Article

CITE

Download Citation

Format:

Include:

Related articles

ABOUT

BROWSE ARTICLES

EDITORIAL POLICIES

FOR CONTRIBUTORS