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열처리한 SiOCH 박막의 결합모드와 유전상수 특성

김종욱, 황창수, 박용헌, 김홍배

Properties of Dielectric Constant and Bonding Mode of Annealed SiOCH Thin Film

Jong Wook Kim, Chang Su Hwang, Yong Heon Park, Hong Bae Kim
J Electr Electron Mater 2009;22(1):47-52.
Published online: January 1, 2009
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Properties of Dielectric Constant and Bonding Mode of Annealed SiOCH Thin Film
J Electr Electron Mater. 2009;22(1):47-52.   Published online January 1, 2009
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Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.
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Properties of Dielectric Constant and Bonding Mode of Annealed SiOCH Thin Film
J Electr Electron Mater. 2009;22(1):47-52.   Published online January 1, 2009
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