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이온주입 공정을 이용한 4H-SiC p-n Diode에 관한 시뮬레이션 연구

이재상, 방욱, 김상철, 김남균, 구상모

Simulation Study on Lon-implanted 4H-SiC p-n Diodes

Jae Sang Lee, Wook Bahng, Sang Cheol Kim, Nam Kyun Kim, Sang Mo Koo
J Electr Electron Mater 2009;22(2):128-131.
Published online: February 1, 2009
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Simulation Study on Lon-implanted 4H-SiC p-n Diodes
J Electr Electron Mater. 2009;22(2):128-131.   Published online February 1, 2009
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

Format:
Include:
Simulation Study on Lon-implanted 4H-SiC p-n Diodes
J Electr Electron Mater. 2009;22(2):128-131.   Published online February 1, 2009
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