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BTMSM/O2 유량변화에 따른 SiOCH 박막의 저유전 특성

박인철, 김홍배

Properties of SiOCH Thin Film Low Dielectric by BTMSM/O2 Flow Rates

In Cheol Park, Hong Bae Kim
J Korean Inst Electr Electron Mater Eng 2009;22(2):132-136.
Published online: February 1, 2009
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Properties of SiOCH Thin Film Low Dielectric by BTMSM/O2 Flow Rates
J Korean Inst Electr Electron Mater Eng. 2009;22(2):132-136.   Published online February 1, 2009
DOI: https://doi.org/10.4313/JKEM.2009.22.2.132
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.
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Properties of SiOCH Thin Film Low Dielectric by BTMSM/O2 Flow Rates
J Korean Inst Electr Electron Mater Eng. 2009;22(2):132-136.   Published online February 1, 2009
DOI: https://doi.org/10.4313/JKEM.2009.22.2.132
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