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양단이 고정된 빔형 다결정 3C-SiC 마이크로 공진기의 제작과 그 특성

정귀상, 이태원

Fabrication of Polycrystalline SiC Doubly Clamped Beam Micro Resonators and Their Characteristics

Gwiy Sang Chung, Tae Won Lee
J Electr Electron Mater 2009;22(4):303-306.
Published online: April 1, 2009
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Fabrication of Polycrystalline SiC Doubly Clamped Beam Micro Resonators and Their Characteristics
J Electr Electron Mater. 2009;22(4):303-306.   Published online April 1, 2009
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.
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Fabrication of Polycrystalline SiC Doubly Clamped Beam Micro Resonators and Their Characteristics
J Electr Electron Mater. 2009;22(4):303-306.   Published online April 1, 2009
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