Temperature Characteristics of Polycrystalline 3C-SiC Micro Resonators

Gwiy Sang Chung; Tae Won Lee

Articles

Page Path

다결정 3C-SiC 마이크로 공진기의 온도특성

정귀상, 이태원

Temperature Characteristics of Polycrystalline 3C-SiC Micro Resonators

Gwiy Sang Chung, Tae Won Lee

J Electr Electron Mater 2009;22(4):314-317.
Published online: April 1, 2009

5 Views
0 Download
0 Crossref
0 Scopus

prev next

Full Article

Download PDF

Keywords: Polycrystalline 3C-SiC, Resonator, Cantilever, Doubly clamped beam

Cite

CITE

export

Copy Download

Format

Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

Format:

RIS — For EndNote, ProCite, RefWorks, and most other reference management software
BibTeX — For JabRef, BibDesk, and other BibTeX-specific software

Include:

Citation for the content below
Citation and abstract for the content below

Temperature Characteristics of Polycrystalline 3C-SiC Micro Resonators

J Electr Electron Mater. 2009;22(4):314-317. Published online April 1, 2009

Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

Format:

RIS — For EndNote, ProCite, RefWorks, and most other reference management software
bib — For JabRef, BibDesk, and other BibTeX-specific software

Include:

Citation for the content below
Citation and abstract for the content below

Temperature Characteristics of Polycrystalline 3C-SiC Micro Resonators

J Electr Electron Mater. 2009;22(4):314-317. Published online April 1, 2009

Articles

Page Path

다결정 3C-SiC 마이크로 공진기의 온도특성

Temperature Characteristics of Polycrystalline 3C-SiC Micro Resonators

Full Article

CITE

Download Citation

Format:

Include:

Related articles

ABOUT

BROWSE ARTICLES

EDITORIAL POLICIES

FOR CONTRIBUTORS