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수소 분위기에서 후열처리한 상온증착 ZnO:Al 박막의 전기적 특성 분석

정윤환, 진호, 김호걸, 박춘배

Analysis of Electrical Property of Room Temperature-grown ZnO:Al Thin Films Annealed in Hydrogen Ambient

Yun Hwan Jeong, Hao Chen, Hu Jie Jin, Choon Bae Park
J Electr Electron Mater 2009;22(4):318-322.
Published online: April 1, 2009
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Analysis of Electrical Property of Room Temperature-grown ZnO:Al Thin Films Annealed in Hydrogen Ambient
J Electr Electron Mater. 2009;22(4):318-322.   Published online April 1, 2009
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.
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Analysis of Electrical Property of Room Temperature-grown ZnO:Al Thin Films Annealed in Hydrogen Ambient
J Electr Electron Mater. 2009;22(4):318-322.   Published online April 1, 2009
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