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Rf-magnetron Sputtering 장치에 의해 제작된 SiO2가 도핑된 ZnO 박막의 전기적 및 광학적 특성

배강, 손선영, 김화민, 홍재석

Electrical and Optical Properties of SiO2-doped ZnO Films Prepared by Rf-magnetron Sputtering System

Kang Bae, Sun Young Sohn, Hwa Min Kim, Jae Suk Hong
J Electr Electron Mater 2009;22(11):969-973.
Published online: November 1, 2009
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Electrical and Optical Properties of SiO2-doped ZnO Films Prepared by Rf-magnetron Sputtering System
J Electr Electron Mater. 2009;22(11):969-973.   Published online November 1, 2009
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

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Electrical and Optical Properties of SiO2-doped ZnO Films Prepared by Rf-magnetron Sputtering System
J Electr Electron Mater. 2009;22(11):969-973.   Published online November 1, 2009
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