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Ellipsometry를 이용한 저 유전상수를 갖는 SiOCH박막의 광학특성 연구

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A Study of Optical Characteristics Correlated With Low Dielectric Constant of SiOCH Thin Films Through Ellipsometry

Yong Heon Park
J Electr Electron Mater 2010;23(3):228-233.
Published online: March 1, 2010
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A Study of Optical Characteristics Correlated With Low Dielectric Constant of SiOCH Thin Films Through Ellipsometry
J Electr Electron Mater. 2010;23(3):228-233.   Published online March 1, 2010
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

Format:
Include:
A Study of Optical Characteristics Correlated With Low Dielectric Constant of SiOCH Thin Films Through Ellipsometry
J Electr Electron Mater. 2010;23(3):228-233.   Published online March 1, 2010
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