Properties of ZnOGa Thin Film Fabricated on Polyimide Substrate by RF Magnetron Sputtering

Seung Beum Park; Jeong Yeon Kim; Byeong Guk Kim; Jong Youb Lim; In Hwan Yeo; Sang Ki Ahn; Soon Yong Kweon; Jae Hwan Park; Dong Gun Lim

doi:10.4313/JKEM.2010.23.5.374

Articles

Page Path

폴리이미드 기판 위에 RF 마그네트론 스퍼터링 공정으로 중착된 ZnOGa 박막의 특성

박승범, 김정연, 김병국, 임종엽, 여인환, 안상기, 권순용, 박재환, 임동건

Properties of ZnOGa Thin Film Fabricated on Polyimide Substrate by RF Magnetron Sputtering

Seung Beum Park, Jeong Yeon Kim, Byeong Guk Kim, Jong Youb Lim, In Hwan Yeo, Sang Ki Ahn, Soon Yong Kweon, Jae Hwan Park, Dong Gun Lim

J Korean Inst Electr Electron Mater Eng 2010;23(5):374-378.
Published online: May 1, 2010

DOI: https://doi.org/10.4313/JKEM.2010.23.5.374

29 Views
0 Download
0 Crossref
0 Scopus

prev next

Full Article

Download PDF

Keywords: Transparent conducting oxide, RF magnetron sputtering, Polyimide substrate, ZnO, O2 plasma

Cite

CITE

export

Copy Download

Format

Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

Format:

RIS — For EndNote, ProCite, RefWorks, and most other reference management software
BibTeX — For JabRef, BibDesk, and other BibTeX-specific software

Include:

Citation for the content below
Citation and abstract for the content below

Properties of ZnOGa Thin Film Fabricated on Polyimide Substrate by RF Magnetron Sputtering

J Korean Inst Electr Electron Mater Eng. 2010;23(5):374-378. Published online May 1, 2010

DOI: https://doi.org/10.4313/JKEM.2010.23.5.374

Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

Format:

RIS — For EndNote, ProCite, RefWorks, and most other reference management software
bib — For JabRef, BibDesk, and other BibTeX-specific software

Include:

Citation for the content below
Citation and abstract for the content below

Properties of ZnOGa Thin Film Fabricated on Polyimide Substrate by RF Magnetron Sputtering

J Korean Inst Electr Electron Mater Eng. 2010;23(5):374-378. Published online May 1, 2010

DOI: https://doi.org/10.4313/JKEM.2010.23.5.374

Articles

Page Path

폴리이미드 기판 위에 RF 마그네트론 스퍼터링 공정으로 중착된 ZnOGa 박막의 특성

Properties of ZnOGa Thin Film Fabricated on Polyimide Substrate by RF Magnetron Sputtering

Full Article

CITE

Download Citation

Format:

Include:

Related articles

ABOUT

BROWSE ARTICLES

EDITORIAL POLICIES

FOR CONTRIBUTORS