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나노재료 및 소자 : In-situ 도핑량이 다공성 3C-SiC 박막의 특성에 미치는 여향

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Nano Materials and Devices : Effects of In-situ doping Concentration on the Characteristics of Porous 3C-SiC Thin Films

Kang San Kim, Gwiy Sang Chung
J Electr Electron Mater 2010;23(6):487-490.
Published online: June 1, 2010
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Nano Materials and Devices : Effects of In-situ doping Concentration on the Characteristics of Porous 3C-SiC Thin Films
J Electr Electron Mater. 2010;23(6):487-490.   Published online June 1, 2010
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

Format:
Include:
Nano Materials and Devices : Effects of In-situ doping Concentration on the Characteristics of Porous 3C-SiC Thin Films
J Electr Electron Mater. 2010;23(6):487-490.   Published online June 1, 2010
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