박막,센서 : RF 마그네트론 스퍼터법을 사용한 전도성 SrMoO3 박막 제조 및 전기전도특성 평가
유희욱, 선호정
Thin Films and Sensors : Preparation of Conductive SrMoO3 Thin Films by RF Magnetron Sputtering and Evaluation of Their Electrical Conduction Properties
Hee Uk Ryu, Ho Jung Sun
J Korean Inst Electr Electron Mater Eng 2011;24(6):468-472.
Published online: June 1, 2011
Conductive SrMoO3 thin films were fabricated by RF magnetron sputtering with the powder-type sputtering target, and annealed for crystallization. When RTP (rapid thermal processing) in vacuum was applied, the fabricated thin films showed the mixed phases of SrMoO3 and SrMoO4, but SrMoO3 phase could be promoted by the lowering of the working pressure during deposition. In order to eliminate O2 gas during deposition and annealing, further lowering of the working pressure and furnace annealing in hydrogen atmosphere were tried. With the optimization of the deposition and annealing conditions, the thin film with nearly single-phase of SrMoO3 was obtained, and it showed good electrical conduction properties with a low resistivity of 2.5×10(-3)Ω·cm at room temperature.
