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기판 온도 변화에 따른 Cu(In,Ga)Se2 박막에 관한 연구

박정철, 추순남

A Study on Cu(In,Ga)Se2 Thin Film with Substrate Temperature Change

Jung Cheul Park, Soon Nam Chu
J Electr Electron Mater 2013;26(12):888-893.
Published online: December 1, 2013
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In this paper, we prepared Cu(In,Ga)Se2 thin films by using co-evaporation method, and analyzed the properties of the thin films. During the thin film preparation process, we confirmed InGaSe2 phase was formed at 400℃ in first stage, and also confirmed the thin films showed the vacancy decrease. In second and third stage,we confirmed the density increase of crystalline structure at over 480℃ and the formation of Cu(In0.7Ga0.3)Se2phase. As the result of SEM and XRD analysis of the films which were before and after heat-treated, we confirmed the disappearance of Cu2Se2 and the formation of Cu(In0.7Ga0.3)Se2 single phase after the heat-treatment,We, therefore, confirmed the heat-treatment did not affect the absorbency spectra of the thin films.

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A Study on Cu(In,Ga)Se2 Thin Film with Substrate Temperature Change
J Electr Electron Mater. 2013;26(12):888-893.   Published online December 1, 2013
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

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A Study on Cu(In,Ga)Se2 Thin Film with Substrate Temperature Change
J Electr Electron Mater. 2013;26(12):888-893.   Published online December 1, 2013
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