The Study on Formation of ITO by DC Reactive Magnetron Sputtering

Ha Hong Ju; Cho Jung Soo; Park Chung Hoo

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반응성 직류마그네트론 스퍼터링에 의한 ITO 박막 형성에 관한 연구

하홍주, 조정수, 박정후

The Study on Formation of ITO by DC Reactive Magnetron Sputtering

Ha Hong Ju, Cho Jung Soo, Park Chung Hoo

J Electr Electron Mater 1995;8(6):699-707.

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The Study on Formation of ITO by DC Reactive Magnetron Sputtering

J Electr Electron Mater. 1995;8(6):699-707.

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Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

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The Study on Formation of ITO by DC Reactive Magnetron Sputtering

J Electr Electron Mater. 1995;8(6):699-707.

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반응성 직류마그네트론 스퍼터링에 의한 ITO 박막 형성에 관한 연구

The Study on Formation of ITO by DC Reactive Magnetron Sputtering

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