MgZnO has attracted a lot of attention for flexible device. In the flexible substrate, the crystalstructure of the thin films as well as the surface morphology is not good. Therefore, in this study, westudied on the effects of the oxygen pressure on the structure and crystallinity of Mg0.3Zn0.7O thin films deposited on PES substrate by using pulsed laser deposition. We used X-ray diffraction and atomic forcemicroscopy in order to observe the structural characteristics of Mg0.3Zn0.7O thin films. The crystallinity ofMg0.3Zn0.7O thin films with increasing temperature was improved, Grain size and RMS of the films wereincreased. UV-visible spectrophotometer was used to get the band gap energy and transmittance. Mg0.3Zn0.7O thin films showed high transmittance over 90% in the visible region. As increased workingpressure from 30 mTorr to 200 mTorr, the bandgap energy of Mg0.3Zn0.7O thin film were decreased from3.59 eV to 3.50 eV.
