Energy problem has been issued in worldwide because fossil fuel has being almost exhausted. A lot of renewable energy have been received attention to replace the energy from fossil fuel. Among them, piezoelectric energy harvester is one of excellent candidates. In general, micro scaled small sized energy harvesters were usually based on the lithography process. However, these lithography process require complicated process and high cost. In this paper, a new process has been proposed for micro-scaled piezoelectric energy harvester. 0.2Pb(Mg1/3Nb2/3)O3-0.8Pb(Zr0.52Ti0.48)O3 composition was used as piezoelectric material due to excellent piezoelectric properties and also can be easily prepared by mixedoxide method.
