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P(VDF-TrFE-CFE)를 이용한 초소형 압전 적층형 진동 출력 소자의 제작

조성우, 조성우, 김재규, 류정재, 김윤정, 김혜진, 박강호, 홍승범

Fabrication of Ultra-Small Multi-Layer Piezoelectric Vibrational Device Using P(VDF-TrFE-CFE)

Seongwoo Cho, Melodie Glasser, Jaegyu Kim, Jeongjae Ryu, Yunjeong Kim, Hyejin Kim, Kang-ho Park, Seungbum Hong
J Electr Electron Mater 2019;32(2):157-160.
Published online: March 1, 2019
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P(VDF-TrFE-CFE) (Poly (vinylidene fluoride-trifluoroethylene-chlorofluoroethylene)), which exhibits a high electrostriction of about 7%, can transmit tactile output as vibration or displacement. In this study, we investigated the applicability of P(VDF-TrFE-CFE) to wearable piezoelectric actuators. The P(VDF-TrFE-CFE) layers were deposited through spin-coating, and interspaced with patterned Ag electrodes to fabricate a two-layer 3.5 mm × 3.5 mm device. This layered structure was designed and fabricated to increase the output and displacement of the actuator at low driving voltages. In addition, a laser vibrometer and piezoelectric force microscope were used to analyze the device’s vibration characteristics over the range of ~200~4,200 Hz. The on-off characteristics were confirmed at a frequency of 40 Hz.

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Fabrication of Ultra-Small Multi-Layer Piezoelectric Vibrational Device Using P(VDF-TrFE-CFE)
J Electr Electron Mater. 2019;32(2):157-160.   Published online March 1, 2019
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

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Include:
Fabrication of Ultra-Small Multi-Layer Piezoelectric Vibrational Device Using P(VDF-TrFE-CFE)
J Electr Electron Mater. 2019;32(2):157-160.   Published online March 1, 2019
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