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Au/Au-Sn 이종접합 적용 레이저 패키징을 통한 Vapor Cell 신뢰성 연구

권진구, 전용민, 김지영, 이은별, 이성의

Study on Reliability of Vapor Cell by Laser Packaging with Au/Au-Sn Heterojunction

Jin Gu Kwon, Yong Min Jeon, Ji Young Kim, Eun Byeol Lee, Seong Eui Lee
J Electr Electron Mater 2020;33(5):367-372.
Published online: September 1, 2020
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As packaging processes for atomic gyroscope vapor cells, the glass tube tip-off process, anodic bonding, and paste sealing have been widely studied. However, there are stability issues in the alkali metal which are caused by impurity elements and leakage during high-temperature processes. In this study, we investigated the applicability of a vapor cell low-temperature packaging process by depositing Au on a Pyrex cell in addition to forming an Au-Sn thin film on a cap to cover the cell, followed by laser irradiation of the Au/Au-Sn interface. The mechanism of the thin film bonding was evaluated by XRD, while the packaging reliability of an Ne gas-filled vapor cell was characterized by variation of plasma discharge behavior with time. Furthermore, we confirmed that the Rb alkaline metal inside the vapor cell showed no color change, indicating no oxidation occurred during the process.

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Study on Reliability of Vapor Cell by Laser Packaging with Au/Au-Sn Heterojunction
J Electr Electron Mater. 2020;33(5):367-372.   Published online September 1, 2020
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

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Study on Reliability of Vapor Cell by Laser Packaging with Au/Au-Sn Heterojunction
J Electr Electron Mater. 2020;33(5):367-372.   Published online September 1, 2020
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