With the recent active development of laser-based weapons/monitoring/communication systems, there is a significant increase in the demand for improved performance of piezoelectric actuators, a key component of both deformable mirror (DM) and fast steering mirror (FSM) in the systems. The conventional polycrystalline piezoelectric ceramic actuators have limitations in improving their characteristics, so the ultrahigh strain PMN-PZT piezoelectric single crystal multilayer actuators have been developed. In this study, the basic experimental methods were developed to evaluate their stability as well as reliability. The limitations of deformation and applied voltage were confirmed through the breakdown voltage test, and the degree of stability was confirmed through the hammering test. In this study, the breakdown voltage test and the hammering test were confirmed to be effective methods to evaluate their stability as well as reliability. Through these studies, the next-generation PMN-PZT piezoelectric single-crystal multilayer actuator is expected to be applied to various piezoelectric application fields by securing reliability as well as excellent piezoelectric properties.
