Analysis of Electron Swarm Diffusion Coefficients and Energy Distribution Function in e- - CF4 Scattering

Sung Chul Ha; Sang Won Lim

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e- - CF4 산란중에서 전자군의 확산계수 및 에너지분포함수 연구

하성철, 임상원

Analysis of Electron Swarm Diffusion Coefficients and Energy Distribution Function in e- - CF4 Scattering

Sung Chul Ha, Sang Won Lim

J Electr Electron Mater 1997;10(4):342-348.

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Analysis of Electron Swarm Diffusion Coefficients and Energy Distribution Function in e- - CF4 Scattering

J Electr Electron Mater. 1997;10(4):342-348.

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Analysis of Electron Swarm Diffusion Coefficients and Energy Distribution Function in e- - CF4 Scattering

J Electr Electron Mater. 1997;10(4):342-348.

Articles

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e- - CF4 산란중에서 전자군의 확산계수 및 에너지분포함수 연구

Analysis of Electron Swarm Diffusion Coefficients and Energy Distribution Function in e- - CF4 Scattering

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