Preparation and characterization of AIN Thin Films by RF sputtering method

Sung Hoon Chung; Young Ho Kim; Dong Chan Moon; Seon Tai Kim

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고주파 때려내기법에 의한 질화알루미늄 박막의 제작과 특성

정성훈, 김영호, 문동찬, 김선태

Preparation and characterization of AIN Thin Films by RF sputtering method

Sung Hoon Chung, Young Ho Kim, Dong Chan Moon, Seon Tai Kim

J Korean Inst Electr Electron Mater Eng 1997;10(7):706-712.

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Preparation and characterization of AIN Thin Films by RF sputtering method

J Korean Inst Electr Electron Mater Eng. 1997;10(7):706-712.

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Preparation and characterization of AIN Thin Films by RF sputtering method

J Korean Inst Electr Electron Mater Eng. 1997;10(7):706-712.

Articles

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고주파 때려내기법에 의한 질화알루미늄 박막의 제작과 특성

Preparation and characterization of AIN Thin Films by RF sputtering method

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