Synthesis of Diamond Thin Films by RF Plasma Assisted Chemical Vapor Deposition

Sang Hee Lee; Duck Chool Lee

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RF 플라즈마 CVD 법에 의한 다이아몬드 박막의 합성

이상희, 이덕출

Synthesis of Diamond Thin Films by RF Plasma Assisted Chemical Vapor Deposition

Sang Hee Lee, Duck Chool Lee

J Korean Inst Electr Electron Mater Eng 1998;11(7):552-556.
Published online: July 1, 1998

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Synthesis of Diamond Thin Films by RF Plasma Assisted Chemical Vapor Deposition

J Korean Inst Electr Electron Mater Eng. 1998;11(7):552-556. Published online July 1, 1998

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Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

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Synthesis of Diamond Thin Films by RF Plasma Assisted Chemical Vapor Deposition

J Korean Inst Electr Electron Mater Eng. 1998;11(7):552-556. Published online July 1, 1998

Articles

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RF 플라즈마 CVD 법에 의한 다이아몬드 박막의 합성

Synthesis of Diamond Thin Films by RF Plasma Assisted Chemical Vapor Deposition

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