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맴브레인 구조를 이용한 미세발열체형 유량센서의 제작과 그 특성

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Fabrication of Microheater Flow Sensors Using Membrane Structure and Its Characteristics

Gwiy Sang Chung, Sang Soo Noh
J Korean Inst Electr Electron Mater Eng 1998;11(11):996-1000.
Published online: November 1, 1998
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Fabrication of Microheater Flow Sensors Using Membrane Structure and Its Characteristics
J Korean Inst Electr Electron Mater Eng. 1998;11(11):996-1000.   Published online November 1, 1998
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Fabrication of Microheater Flow Sensors Using Membrane Structure and Its Characteristics
J Korean Inst Electr Electron Mater Eng. 1998;11(11):996-1000.   Published online November 1, 1998
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