Fabrication of Microheater Flow Sensors Using Membrane Structure and Its Characteristics

Gwiy Sang Chung; Sang Soo Noh

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맴브레인 구조를 이용한 미세발열체형 유량센서의 제작과 그 특성

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Fabrication of Microheater Flow Sensors Using Membrane Structure and Its Characteristics

Gwiy Sang Chung, Sang Soo Noh

J Electr Electron Mater 1998;11(11):996-1000.
Published online: November 1, 1998

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Fabrication of Microheater Flow Sensors Using Membrane Structure and Its Characteristics

J Electr Electron Mater. 1998;11(11):996-1000. Published online November 1, 1998

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Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

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Citation for the content below
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Fabrication of Microheater Flow Sensors Using Membrane Structure and Its Characteristics

J Electr Electron Mater. 1998;11(11):996-1000. Published online November 1, 1998

Articles

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맴브레인 구조를 이용한 미세발열체형 유량센서의 제작과 그 특성

Fabrication of Microheater Flow Sensors Using Membrane Structure and Its Characteristics

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