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텅스텐 폴리사이드의 산화반응속도에 미치는 인 도핑 농도의 영향 ( Ⅰ ) - Annealing 처리한 polycide 의 산화 -

이종무, 윤국한, 임호빈, 이종길

Effects of Phosphorus Doping Concentration on the Oxidation Kinetics of Tungsten Polycide ( Ⅰ )

Chong Mu Lee, Kook Han Yoon, Ho Bin Im, Jong Gil Lee
J Electr Electron Mater 1991;4(1):19-30.
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Effects of Phosphorus Doping Concentration on the Oxidation Kinetics of Tungsten Polycide ( Ⅰ )
J Electr Electron Mater. 1991;4(1):19-30.
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Effects of Phosphorus Doping Concentration on the Oxidation Kinetics of Tungsten Polycide ( Ⅰ )
J Electr Electron Mater. 1991;4(1):19-30.
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