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CMP공정에 기인하는 소자특성의 열화를 방지하기 위한 PMD 구조에 대한 연구

서용진, 김상용, 김태형, 김창일, 이우선, 장의구

A Study on PMD ( Pre - Metal Dielectric ) Structure to Prevent Device Degradation Induced by CMP Process

Yong Jin Seo, Sang Yong Kim, Tae Hyung Kim, Chang Il Kim, Woo Sun Lee, Eui Goo Chang
J Korean Inst Electr Electron Mater Eng 1999;12(2):111-117.
Published online: February 1, 1999
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A Study on PMD ( Pre - Metal Dielectric ) Structure to Prevent Device Degradation Induced by CMP Process
J Korean Inst Electr Electron Mater Eng. 1999;12(2):111-117.   Published online February 1, 1999
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.
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A Study on PMD ( Pre - Metal Dielectric ) Structure to Prevent Device Degradation Induced by CMP Process
J Korean Inst Electr Electron Mater Eng. 1999;12(2):111-117.   Published online February 1, 1999
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