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전계 방출 소자용 실리콘 팁에 대한 금속 박막(Ti, Nb) 코팅 및 실리사이드화

주병권, 박재석, 윤재형, 김경욱, 강문식, 백경갑, 장진, 차균현, 오명환

Metal(Ti, Nb) Coating and Silicidization of Si-tip for Field Emitter Applications

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J Electr Electron Mater 1999;12(4):291-297.
Published online: April 1, 1999
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Metal(Ti, Nb) Coating and Silicidization of Si-tip for Field Emitter Applications
J Electr Electron Mater. 1999;12(4):291-297.   Published online April 1, 1999
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Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.
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Metal(Ti, Nb) Coating and Silicidization of Si-tip for Field Emitter Applications
J Electr Electron Mater. 1999;12(4):291-297.   Published online April 1, 1999
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