A study on deposition and characterization of low-k Parylene film

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Low-K parylene 박막 증착 및 특성에 대한 연구

허현, 서주원, 김민수, 반재경

A study on deposition and characterization of low-k Parylene film

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J Electr Electron Mater 1999;12(4):326-332.
Published online: April 1, 1999

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Keywords: Low dielectric, 저유전율, Parylene, 파릴렌, Cu chip, 구리칩, coplanar waveguide, 평판형도파관, Finite element method, 유한요소법

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A study on deposition and characterization of low-k Parylene film

J Electr Electron Mater. 1999;12(4):326-332. Published online April 1, 1999

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Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

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A study on deposition and characterization of low-k Parylene film

J Electr Electron Mater. 1999;12(4):326-332. Published online April 1, 1999

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Low-K parylene 박막 증착 및 특성에 대한 연구

A study on deposition and characterization of low-k Parylene film

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