NO2 Gas Sensor Utilizing Pt-WO3-SiO2-Si-Al Capacitor

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센서,기능성 박막 ; Pt-WO3-Si3N4-SiO2-Si-Al 캐패시터를 이용한 NO2 가스 센서

김창교, 이주헌, 이영환, 안달, 유광수

NO2 Gas Sensor Utilizing Pt-WO3-SiO2-Si-Al Capacitor

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J Electr Electron Mater 1999;12(4):333-339.
Published online: April 1, 1999

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Keywords: MIS capacitor, CAIS structure, catalyst, NO2 gas, gas sensor

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NO2 Gas Sensor Utilizing Pt-WO3-SiO2-Si-Al Capacitor

J Electr Electron Mater. 1999;12(4):333-339. Published online April 1, 1999

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Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

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NO2 Gas Sensor Utilizing Pt-WO3-SiO2-Si-Al Capacitor

J Electr Electron Mater. 1999;12(4):333-339. Published online April 1, 1999

Articles

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센서,기능성 박막 ; Pt-WO3-Si3N4-SiO2-Si-Al 캐패시터를 이용한 NO2 가스 센서

NO2 Gas Sensor Utilizing Pt-WO3-SiO2-Si-Al Capacitor

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